1/18/2024 0 Comments Piezo actuator staackSemiconductor manufacturing equipment makers are already using piezo actuators from TDK. The piezo actuators are aimed at nano-positioning applications such as valve control for liquids and gasses in process engineering. These actuators are constructed by bonding multiple layers of piezoelectric material together. Piezo stack is also known as piezoelectric stacks or PZT stack. The Ø5.0 mm discrete stacks provide 11.0 µm of travel when driven to 200 V, while the Ø8.3 mm stacks provide 12.0 µm of travel when driven to 200 V. The COM10S5 (Z63000Z2910Z001Z78) with 10 mm height and 16 µm of stroke, COM27S3 (Z63000Z2910Z001Z77, leaded) with 27 mm height and 47 µm of stroke, and the COM30S7 (Z63000Z2910Z001Z70) with 30 mm of height and 7 mm x 7 mm of cross-section delivering 55 µm of stroke and 2600 N of blocking force. Piezoelectric stack actuators have been widely used in high-speed nanopositioning due to its ability to provide ultra-fast responses, fine movement, and high pushing force ( Physik Instrumente, 2016 ). TDK plans to release three more PZT piezo actuators in 2023 to cover a wider application range.
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |